Mode-Matched MEMS Gyroscope in COMSOL with Electrostatic Tuning
COMSOL / MEMS

Low-rate gyroscopes must resolve small Coriolis-induced motion relative to the driven vibration while minimizing mode mismatch, cross-axis response and numerical artifacts.
A vibratory gyroscope excites a controlled drive vibration and detects motion in an orthogonal sense direction. The eigenmodes should be identified before applying angular rate so the intended mechanical coupling is clear.
Rotational motion produces a Coriolis force proportional to angular rate and drive velocity. The implementation should keep the coordinate system, rotation axis, damping and harmonic excitation consistent.
At low angular rates, sense displacement can be very small. Mesh quality, mode separation, damping assumptions and numerical tolerances can strongly influence the predicted sensitivity.
Report eigenfrequencies, mode shapes, drive/sense amplitudes, angular-rate sensitivity, linearity and structural stress. A rate sweep is more informative than a single operating point.
Mode matching, temperature compensation, fabrication tolerances, closed-loop control and capacitive readout/noise models can substantially deepen the work.
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